Technology Outline (Process Description)

Microsupercapacitors (MSCs) are considered the most promising miniaturized electrochemical energy storage devices in wearable electronics, microsensors, and energy harvesters. The on-chip MSCs are used as a miniaturized power source in these devices because of their small device area, high power density, fast charging-discharging, and long operation life. The prime objective of thisproject is to develop on-chip microsupercapacitors operating in a wide temperature operating range with improved electrochemical performance by exploring novel electrode materials. Many machines and electronic devices such as micro-robots, hybrid electric vehicles, and dielectric elastomers generally require high-voltage power supplies. The low voltage window of the planar on-chip MSCs has been a bottleneck in designing miniature power sources in such microelectronic devices. To achieve a high voltage window, a non-aqueous polymer gel electrolyte having liquid electrolyte (ionic liquid) entrapped in the polymer matrix is utilized. In the present work, novel transition metal nitrides- based interdigitated on-chip MSCs are fabricated by using a shadow mask during the magnetron co-sputtering technique on silicon substrates.